Optical characterization of epitaxial semiconductor layers with 271 figures springer contents contributors xv 342 semiconductor heterostructures 105 3421 algaas gaasp 106 653 characterisation of epitaxial layers grown tilted relative to the substrates 323. Optical characterization of epitaxial semiconductor layers the last decade has witnessed an explosive development in the growth of expitaxial layers and structures with atomic scale dimensions this progress has created new demands for the characterization of those stuctures. The characterization of epitaxial layers and their surfaces has benefitted a lot from the enormous progress of optical analysis techniques during the last decade in particular the dramatic improvement of the structural quality of semiconductor epilayers and heterostructures results to a great. Optical characterization of epitaxial semiconductor layers by gunther bauer 1996 springer berlin heidelberg edition electronic resource in english